equipment market
VCR seal surfaces
port locations
available
Ultra-Clean CNC Machining for Gas Delivery
Semiconductor gas delivery systems transport corrosive, toxic, and pyrophoric process gases through manifolds, valves, and flow controllers to the process chamber. Every component must be leak-tight, internally deburred, and finished to semiconductor cleanliness standards. A burr inside a gas passage or a rough VCR seal surface can cause particle contamination, gas leaks, or equipment failure. We machine 316L stainless steel, Hastelloy C-22, and aluminum 6061-T6 to tolerances as tight as ±0.0005" with surface finishes below Ra 16 microinches on all sealing interfaces.
Corrosion-Resistant Materials
We machine 316L stainless steel and Hastelloy C-22 for corrosive gas compatibility — all with full mill certs and material traceability for semiconductor documentation.
Ultra-Tight Tolerances
We hold ±0.0005" on VCR seal faces and ±0.001" on manifold port positions. Internal passages are fully deburred and verified under magnification.
Cleanroom-Compatible Docs
Dimensional inspection reports, material certs, and internal cleanliness verification. Documentation your quality team needs for gas panel qualification.
Parts for Gas Delivery Systems
Manifold blocks, MFC bodies, valve seats, and more — machined leak-tight and deburr-free.
Gas Manifold Blocks
Multi-port gas manifold blocks machined from 316L stainless and Hastelloy with cross-drilled internal passages, VCR face seal ports, and mounting interfaces. All internal passages fully deburred and cleaned.
316L stainlessMass Flow Controller Bodies
MFC bodies machined from 316L stainless with precision inlet and outlet ports, sensor cavity mounting surfaces, and internal flow channels. All sealing faces finished below Ra 16 microinches.
<Ra 16µin sealsValve Seats
Pneumatic and manual valve seat components machined from 316L stainless and Hastelloy with precision bore fits, sealing surfaces, and diaphragm interfaces. Surface finishes below Ra 8 microinches on metal seal faces.
±0.0005" boreGas Stick Assemblies
Gas stick component blocks and mounting substrates machined from 316L stainless. Precision-located VCR and W-seal ports, through-holes for pneumatic valve mounting, and surface-mount configurations.
VCR face sealsPurge Panel Components
Purge panel manifolds and distribution blocks machined from 316L stainless. Multi-port configurations with internal cross-drilling, pressure gauge ports, and relief valve interfaces.
Deburr-free internalsCylinder Connector Blocks
Gas cylinder interface blocks machined from 316L stainless and Hastelloy C-22 with CGA fitting ports, excess flow valve cavities, and purge connections. Designed for high-purity and corrosive gas service.
Hastelloy C-22Serving the Gas Delivery Equipment Industry
Every semiconductor fab uses hundreds of gas lines to deliver process gases — from inert nitrogen to highly corrosive fluorine compounds. The gas delivery subsystem is one of the most safety-critical components in the fab, and every manifold block, valve body, and connector must be machined to exacting standards.
Equipment OEMs and gas panel integrators need machine shops that understand VCR face seal geometry, internal passage deburring requirements, and the corrosion-resistant materials that ensure safe operation with hazardous gases.
We machine gas delivery components for equipment builders across the US. Instant AI pricing the moment you upload your file.
Applied Materials
World's largest semiconductor equipment maker. Their deposition and etch platforms integrate complex gas delivery manifolds requiring precision-machined 316L stainless components.
Lam Research
Leading etch equipment maker whose tools use multi-gas delivery systems with precision manifolds, flow controllers, and valve assemblies machined from corrosion-resistant alloys.
KLA Corporation
Process control leader whose inspection and metrology tools require precision gas delivery for purge systems and controlled atmosphere environments.
ASML
EUV lithography systems require ultra-pure gas delivery for optics purge systems and controlled environments, demanding the highest cleanliness standards.
Tokyo Electron (TEL)
Major coater/developer and etch OEM whose platforms integrate gas delivery subsystems requiring precision-machined manifolds and valve components.
Built for Gas Delivery Teams
Gas delivery parts need a shop that understands internal cleanliness as well as machining.
Internal Passage Deburring
Every cross-drilled passage and internal port is deburred using specialized tools and verified under magnification. Zero burrs, zero chips, zero contamination risk in your gas lines.
Full Material Traceability
Every order ships with mill certs and heat lot numbers. Complete traceability from raw 316L stainless or Hastelloy billet to finished gas delivery component.
CMM Inspection on Every Order
We verify every critical dimension before shipping — port positions, bore diameters, seal surface flatness, and groove geometry. Reports go with every part.
Fast Prototype Turnaround
Your gas panel development schedule does not wait. Gas delivery prototypes in 5 to 7 days so your program keeps moving. Rush available on simple geometries.
Questions about our current quality setup? Email us — we'll send our documentation package.
From File to Part in 3 Steps
Simple, clear, and designed for fast-moving gas delivery equipment teams.
Upload & Quote
Send your STEP or IGES file. Pick your material, quantity, and finish. Our AI gives you a real price right away. We also run a free DFM check and flag anything that could affect gas system integrity.
We Machine & Inspect
Your parts run on our CNC mills and lathes. Every order gets CMM inspection. We verify port dimensions, internal deburring, and sealing surface finish on every gas delivery component.
Ship with Full Docs
Parts ship with dimensional inspection reports, material certs, and internal cleanliness verification. Everything your quality team needs for gas panel qualification and safety documentation.
Other Semiconductor Sub-Industries
We machine parts for every segment of the semiconductor equipment market.
Wafer Handling
end effectors, wafer chucks, FOUP plates
Vacuum Systems
chamber lids, gate valve housings, flanges
Process Equipment
showerheads, pedestals, RF match housings
Metrology Equipment
inspection stages, optical bench mounts, fixtures
Test Equipment
probe card frames, handler parts, thermal chucks
Questions from Gas Delivery Teams
Gas Delivery CNC Machining by City
We serve semiconductor gas delivery teams in cities across the US.
Upload Your Gas Delivery CAD File
Manifold blocks, MFC bodies, valve seats, gas stick assemblies — we machine them all with leak-tight, deburr-free finishes. Get instant AI pricing now.
No minimums · 100% Made in USA · Never brokered · Ships anywhere in the US
AI price estimates are usually within ±20% of final price. Complex parts may get a human review within one business day before pricing is confirmed.