equipment market
O-ring seal surfaces
surface flatness
available
Leak-Tight CNC Machining for Vacuum Systems
Semiconductor vacuum systems demand parts where every sealing surface, O-ring groove, and flange interface is machined to leak-tight standards. A scratch on a sealing surface or a rough O-ring groove can cause process contamination and costly tool downtime. We machine aluminum 6061-T6, 316L stainless, and Hastelloy C-276 to tolerances as tight as ±0.0005" with surface finishes below Ra 16 microinches on all sealing interfaces. Every part ships with full dimensional inspection reports.
Semiconductor-Grade Materials
We source and machine aluminum 6061-T6, 316L stainless steel, and Hastelloy C-276 — all with full mill certs and material traceability for vacuum system documentation.
Ultra-Tight Tolerances
We hold ±0.0005" on O-ring groove dimensions and flatness within 0.0005" on sealing surfaces. Every part is CMM verified before shipping.
Cleanroom-Compatible Docs
Dimensional inspection reports, material certs, and surface finish verification data. Documentation your quality team needs for vacuum system qualification and helium leak test correlation.
Parts for Semiconductor Vacuum Systems
Chamber lids, gate valves, flanges, viewports, and more — machined leak-tight.
Vacuum Chamber Lids
Process chamber lids machined from aluminum 6061-T6 and 316L stainless with O-ring grooves, port cutouts, viewport openings, and water cooling channels. Flatness within 0.001" on sealing faces.
Leak-tight sealingGate Valve Housings
Gate valve bodies and housings machined from aluminum and stainless steel with precision bore fits, seal grooves, and mounting interfaces. Bore tolerances within ±0.0005" for reliable valve operation.
±0.0005" bore toleranceTurbo Pump Flanges
CF and ISO flanges for turbo molecular pump mounting machined from 316L stainless and aluminum. Knife-edge features, bolt circle patterns, and sealing surfaces finished to vacuum-grade standards.
CF & ISO standardsViewport Frames
Viewport mounting frames machined from stainless steel with precision bore fits for glass or sapphire windows, O-ring seal grooves, and bolt patterns. All dimensions CMM verified for leak-free operation.
Sapphire-compatibleLoad Lock Assemblies
Load lock chamber bodies and lids machined from aluminum with dual O-ring seal grooves, slit valve interfaces, and wafer transfer slot openings. Designed for rapid pump-down and atmospheric cycling.
Dual O-ring sealsBellows Adapters
Bellows adapter flanges and transition pieces machined from 316L stainless and Hastelloy. Weld prep surfaces, CF-style knife edges, and rotatable flange configurations for flexible vacuum connections.
316L & HastelloyServing the Vacuum Equipment Industry
Every semiconductor process tool — whether it performs deposition, etch, implant, or inspection — relies on vacuum systems. Chamber bodies, lids, flanges, and valves must be machined to exacting standards to maintain the ultra-high vacuum environments that enable sub-nanometer processing.
Equipment OEMs and their Tier 1 suppliers need machine shops that understand O-ring groove specifications, ConFlat knife-edge geometry, and the surface finish requirements that determine whether a chamber will pass helium leak test.
We machine vacuum components for equipment builders across the US. Instant AI pricing the moment you upload your file.
Applied Materials
World's largest semiconductor equipment maker. Their CVD, PVD, and etch platforms depend on precision vacuum chamber components and sealing interfaces.
Lam Research
Leading etch and deposition equipment maker. Lam tools use multi-station vacuum chambers that require precisely machined lids, bodies, and transfer interfaces.
KLA Corporation
Process control and inspection leader. Many KLA tools operate under vacuum for electron-beam and X-ray inspection, requiring precision chamber components.
ASML
EUV lithography systems operate in extreme vacuum environments. Chamber components require the tightest tolerances and cleanest finishes in the industry.
Tokyo Electron (TEL)
Major semiconductor equipment OEM whose etch and thermal processing tools rely on precision-machined vacuum chambers and load lock assemblies.
Built for Vacuum Equipment Teams
Vacuum components need a shop that understands sealing surfaces as well as machining.
Leak-Tight Sealing Surfaces
Every O-ring groove and sealing face is machined to specification with surface finishes below Ra 16 microinches. We verify groove dimensions on CMM and inspect surfaces under magnification.
Full Material Traceability
Every order ships with mill certs and heat lot numbers. Your records are solid from raw material to finished vacuum component — ready for equipment qualification audits.
CMM Inspection on Every Order
We verify every critical dimension before shipping — O-ring groove depth and width, flatness, bore diameter, and bolt pattern position. Reports go with every part.
Fast Prototype Turnaround
Your equipment development schedule does not wait. Vacuum system prototypes in 5 to 7 days so your program keeps moving. Rush available on simple geometries.
Questions about our current quality setup? Email us — we'll send our documentation package.
From File to Part in 3 Steps
Simple, clear, and designed for fast-moving semiconductor equipment teams.
Upload & Quote
Send your STEP or IGES file. Pick your material, quantity, and finish. Our AI gives you a real price right away. We also run a free DFM check and flag anything that could affect vacuum integrity.
We Machine & Inspect
Your parts run on our CNC mills and lathes. Every order gets CMM inspection. We verify O-ring groove dimensions, flatness, and sealing surface finish on every vacuum component.
Ship with Full Docs
Parts ship with dimensional inspection reports, material certs, and surface finish verification. Everything your quality team needs for vacuum system qualification and leak test correlation.
Other Semiconductor Sub-Industries
We machine parts for every segment of the semiconductor equipment market.
Questions from Vacuum Equipment Teams
Vacuum Systems CNC Machining by City
We serve semiconductor equipment teams in cities across the US.
Upload Your Vacuum System CAD File
Chamber lids, gate valve housings, flanges, load locks — we machine them all with leak-tight, semiconductor-grade finishes. Get instant AI pricing now.
No minimums · 100% Made in USA · Never brokered · Ships anywhere in the US
AI price estimates are usually within ±20% of final price. Complex parts may get a human review within one business day before pricing is confirmed.