equipment market
plasma-facing surfaces
hole patterns
available
Ultra-Clean CNC Machining for Process Equipment
Semiconductor process equipment operates in extreme environments — plasma chambers, high-temperature pedestals, and RF-driven reactors. Every component must be dimensionally precise, surface-finished to semiconductor standards, and free of contamination. A rough surface on a showerhead electrode or misaligned pedestal can cause non-uniform deposition, particle defects, or wafer damage. We machine aluminum 6061-T6, 316L stainless, and Hastelloy C-276 to tolerances as tight as ±0.0005" with surface finishes below Ra 16 microinches.
Semiconductor-Grade Materials
We machine aluminum 6061-T6, 316L stainless steel, Hastelloy C-276, and copper alloys — all with full mill certs and material traceability for equipment qualification.
Ultra-Tight Tolerances
We hold ±0.0005" on critical mating surfaces and ±0.001" on hole pattern positions. Every part is CMM verified before shipping.
Cleanroom-Compatible Docs
Dimensional inspection reports, material certs, and surface finish verification. Documentation your quality team needs for equipment qualification and process validation.
Parts for Process Equipment
Showerheads, pedestals, RF housings, confinement rings, and more.
Showerhead Electrodes
Gas distribution showerhead plates machined from aluminum 6061-T6 with precision hole patterns (0.020" to 0.060" diameter), gas plenum cavities, and RF contact surfaces. Deburr-free holes with position tolerance ±0.002".
Precision hole patternsPedestal Heater Bases
Pedestal bases machined from aluminum with precision wafer seating surfaces, lift pin bores, heater element cavities, and thermocouple mounting holes. Flatness within 0.001" on wafer-contact surface.
±0.001" flatnessRF Match Housings
RF impedance matching network housings machined from aluminum with precision cavity dimensions, RF connector mounting holes, cooling channel interfaces, and grounding contact surfaces. Arc-free internal finishes.
Arc-free finishPlasma Confinement Rings
Plasma confinement and focus rings machined from aluminum and specialty alloys with tight concentricity, uniform slot patterns, and plasma-facing surfaces finished below Ra 16 microinches.
<Ra 16µin finishEtch Chamber Components
Chamber liners, gas distribution rings, electrode clamps, and baffle plates machined from aluminum, Hastelloy, and 316L stainless for corrosive plasma chemistry environments. All surfaces deburr-free.
Hastelloy C-276Serving the Process Equipment Industry
Every semiconductor chip is built through hundreds of process steps — deposition, etch, implant, anneal, and more. Each step relies on precision process chamber components that must withstand extreme temperatures, corrosive chemistries, and RF plasma environments.
Equipment OEMs and their supply chains need machine shops that understand the surface finish requirements, material compatibility constraints, and dimensional precision that determine whether a chamber component will perform reliably in production.
We machine process equipment components for semiconductor tool builders across the US. Instant AI pricing the moment you upload your file.
Applied Materials
World's largest semiconductor equipment maker with CVD, PVD, etch, and CMP platforms all requiring precision-machined process chamber components.
Lam Research
Leading etch and deposition equipment maker. Lam's plasma etch platforms require showerhead electrodes, confinement rings, and chamber components machined to exacting standards.
KLA Corporation
Process control and inspection leader whose tools incorporate precision stages and chamber components for electron-beam and optical inspection systems.
ASML
EUV lithography systems require ultra-precision components for wafer stages and controlled environment chambers operating at extreme specifications.
Tokyo Electron (TEL)
Major coater/developer and etch OEM whose platforms integrate precision-machined process chamber components including pedestals, showerheads, and confinement rings.
Built for Process Equipment Teams
Process chamber components need a shop that understands plasma environments as well as machining.
Semiconductor-Grade Surface Finishes
Plasma-facing surfaces finished below Ra 16 microinches. Deburr-free edges on all hole patterns. We inspect under magnification to verify zero contamination sources.
Full Material Traceability
Every order ships with mill certs and heat lot numbers. Complete traceability from raw billet to finished process equipment component — ready for equipment qualification audits.
CMM Inspection on Every Order
We verify every critical dimension before shipping — flatness, concentricity, hole positions, and surface finish. Reports go with every part so your team has full confidence.
Fast Prototype Turnaround
Your equipment development schedule does not wait. Process equipment prototypes in 5 to 7 days so your program keeps moving. Rush available on simple geometries.
Questions about our quality setup? Email us — we'll send our documentation package.
From File to Part in 3 Steps
Simple, clear, and designed for fast-moving process equipment teams.
Upload & Quote
Send your STEP or IGES file. Pick your material, quantity, and finish. Our AI gives you a real price right away. We also run a free DFM check.
We Machine & Inspect
Your parts run on our CNC mills and lathes. Every order gets CMM inspection. We verify flatness, hole patterns, concentricity, and surface finish on every component.
Ship with Full Docs
Parts ship with dimensional inspection reports, material certs, and surface finish verification. Everything for equipment qualification and process validation.
Other Semiconductor Sub-Industries
We machine parts for every segment of the semiconductor equipment market.
Questions from Process Equipment Teams
Process Equipment CNC Machining by City
We serve semiconductor process equipment teams across the US.
Upload Your Process Equipment CAD File
Showerhead electrodes, pedestal heater bases, RF match housings, plasma confinement rings — we machine them all with semiconductor-grade precision. Get instant AI pricing now.
No minimums · 100% Made in USA · Never brokered · Ships anywhere in the US
AI price estimates are usually within ±20% of final price. Complex parts may get a human review within one business day.