metrology market
reference surfaces
mounting features
available
Ultra-Precision CNC Machining for Metrology
Semiconductor metrology and inspection equipment measures wafer features at the nanometer scale. The mechanical components that position wafers, hold optics, and mount sensors must deliver sub-micron positional repeatability with ultra-flat reference surfaces and thermally stable mounting platforms. A warped stage plate or an out-of-position dowel pin hole can shift optical alignment and corrupt measurement data across an entire wafer lot. We machine aluminum 6061-T6, 316L stainless steel, Invar 36, and sapphire-interfacing fixtures to tolerances as tight as ±0.0005" with surface finishes below Ra 16 microinches on all datum and reference surfaces.
Thermally Stable Materials
We machine Invar 36, Super Invar, and aluminum 6061-T6 for optical bench mounts and inspection stages. Invar's ultra-low CTE is critical for maintaining alignment under temperature drift.
Ultra-Flat Reference Surfaces
We hold flatness within 0.0002" per linear inch on stage reference surfaces and datum planes. Positional accuracy on dowel pin holes within ±0.0005" for kinematic mount repeatability.
Full Inspection Documentation
Every metrology component ships with CMM inspection reports, material certs, and surface finish verification. Full traceability for your equipment qualification process.
Parts for Metrology Equipment
Inspection stages, optical mounts, probe card holders, and more — machined ultra-flat and deburr-free.
Inspection Stage Plates
XY and theta stage plates machined from aluminum 6061-T6 and Invar 36 with ultra-flat reference surfaces, precision dowel pin holes, and linear rail mounting interfaces. Flatness within 0.0002" per inch.
Invar 36 & aluminumWafer Chuck Inserts
Vacuum chuck inserts machined from aluminum and SiC-compatible ceramics with precision vacuum groove patterns, lift pin clearance holes, and ultra-flat wafer contact surfaces finished below Ra 16 microinches.
<Ra 16µin surfaceOptical Bench Mounts
Kinematic and semi-kinematic optical bench mounts machined from Invar 36 and Super Invar. Precision V-groove seats, spherical locating pockets, and dowel pin interfaces for repeatable lens and mirror positioning.
Super Invar availableProbe Card Holders
Probe card holder frames machined from aluminum 6061-T6 and stainless steel with precision guide pin locations, card retention features, and alignment datums. Pin positional accuracy within ±0.0005".
±0.0005" pin locationsCalibration Fixtures
Step-height standards, pitch calibration fixtures, and alignment verification tools machined from hardened tool steel and stainless steel. Reference surfaces ground and lapped for sub-microinch flatness.
CMM-verifiedReference Blocks
Flatness and parallelism reference blocks machined from tool steel and 316L stainless with opposing surfaces ground parallel within 0.0001". Used to calibrate metrology equipment and validate measurement systems.
0.0001" parallelismServing the Metrology Equipment Industry
Semiconductor fabs rely on metrology and inspection tools at nearly every process step — measuring critical dimensions, overlay alignment, film thickness, and defect density. As chip geometries shrink below 3nm, the mechanical precision demanded from inspection stages, optical mounts, and probe card holders increases exponentially.
Equipment OEMs and integrators need machine shops that understand kinematic mounting, thermal stability requirements, and the ultra-flat reference surfaces that ensure measurement accuracy at the nanometer scale.
We machine metrology equipment components for tool builders across the US. Instant AI pricing the moment you upload your file.
Applied Materials
The world's largest semiconductor equipment maker builds inspection and process control systems requiring precision-machined optical bench mounts and wafer positioning stages.
Lam Research
Leading etch and deposition equipment maker whose tools integrate endpoint detection and metrology subsystems requiring precision-machined sensor mounting components.
KLA Corporation
The dominant player in semiconductor process control and inspection. KLA's wafer inspection, review, and metrology tools rely on ultra-precision mechanical stages and optical mounts.
ASML
EUV and DUV lithography systems incorporate extensive metrology subsystems for alignment and overlay measurement, requiring thermally stable mounts machined from Invar and Super Invar.
Tokyo Electron (TEL)
Major coater/developer and etch OEM whose platforms incorporate inline metrology modules requiring precision wafer positioning stages and calibration fixtures.
Built for Metrology Teams
Metrology parts demand a shop that understands positional accuracy as well as surface flatness.
Ultra-Flat Reference Surfaces
We hold flatness within 0.0002" per linear inch on stage plates and reference surfaces. Datum planes are verified on our CMM before any part ships. No warps, no waviness, no guesswork.
Full Material Traceability
Every order ships with mill certs and heat lot numbers. Complete traceability from raw Invar, aluminum, or stainless billet to finished metrology component for your equipment qualification.
CMM Inspection on Every Order
We verify every critical dimension before shipping — flatness, parallelism, positional accuracy of dowel pin holes, and surface finish. Inspection reports go with every part.
Fast Prototype Turnaround
Your metrology tool development schedule does not wait. Inspection stage and optical mount prototypes in 5 to 7 days so your program keeps moving. Rush available on simple geometries.
Questions about our current quality setup? Email us — we'll send our documentation package.
From File to Part in 3 Steps
Simple, clear, and designed for fast-moving metrology equipment teams.
Upload & Quote
Send your STEP or IGES file. Pick your material, quantity, and finish. Our AI gives you a real price right away. We also run a free DFM check and flag anything that could affect measurement accuracy.
We Machine & Inspect
Your parts run on our CNC mills and lathes. Every order gets CMM inspection. We verify flatness, positional accuracy of mounting features, and surface finish on every metrology component.
Ship with Full Docs
Parts ship with dimensional inspection reports, material certs, and surface finish verification. Everything your quality team needs for metrology equipment qualification and tool validation.
Other Semiconductor Sub-Industries
We machine parts for every segment of the semiconductor equipment market.
Questions from Metrology Teams
Metrology CNC Machining by City
We serve semiconductor metrology teams in cities across the US.
Upload Your Metrology CAD File
Inspection stages, optical bench mounts, probe card holders, calibration fixtures — we machine them all with ultra-flat, deburr-free finishes. Get instant AI pricing now.
No minimums · 100% Made in USA · Never brokered · Ships anywhere in the US
AI price estimates are usually within ±20% of final price. Complex parts may get a human review within one business day before pricing is confirmed.